PHASE-SEPARATION IN INTERACTIONS OF TANTALUM CHROMIUM-ALLOY ON SI

TitlePHASE-SEPARATION IN INTERACTIONS OF TANTALUM CHROMIUM-ALLOY ON SI
Publication TypeJournal Article
Year of Publication1983
AuthorsPalmstrom C.J, Gyulai J., Mayer J.W
JournalJournal of Vacuum Science & Technology a-Vacuum Surfaces and Films
Volume1
Pagination452-454